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Updated: Oct 24, 2026

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
09:15

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects

Published on: January 4, 2016

Mechanism of HF etching of silicon surfaces: A theoretical understanding of hydrogen passivation

Trucks, Raghavachari, Higashi

    Physical Review Letters
    |July 23, 1990
    PubMed
    Abstract

    No abstract available in PubMed .

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