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Related Experiment Videos

Application of X-ray Optics to Energy-Dispersive Spectroscopy.

McCarthy1, McMillan

  • 1Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI 53562

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|May 18, 1999
PubMed
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A grazing incidence optic (GIO) enhances X-ray flux for electron beam microanalysis with energy-dispersive spectroscopy. This optic significantly boosts X-ray signals below 1 keV with minimal artifacts.

Area of Science:

  • Analytical Chemistry
  • Materials Science
  • Spectroscopy

Background:

  • X-ray optics are established tools in X-ray analytical instruments.
  • Previous applications include X-ray diffraction, X-ray fluorescence, and wavelength dispersive spectroscopy.
  • X-ray optics serve to enhance X-ray flux or focus emitted X-rays.

Purpose of the Study:

  • To evaluate a grazing incidence optic (GIO) as a flux-enhancing collimator.
  • To assess the GIO's performance with an energy-dispersive (ED) detector for electron beam microanalysis.
  • To determine the GIO's impact on X-ray intensity and spectral quality.

Main Methods:

  • Utilized a grazing incidence optic (GIO) in conjunction with an energy-dispersive spectrometer (EDS).
  • Performed electron beam microanalysis to collect X-ray spectra.

Related Experiment Videos

  • Analyzed X-ray intensity gains, particularly for low-energy X-ray lines (below 1 keV).
  • Evaluated the focusing effect and spectral artifacts introduced by the GIO.

    • Main Results:

    • The GIO significantly increased X-ray intensity for lines below 1 keV when used with an EDS detector.
    • A modest focusing effect was observed with the GIO.
    • The GIO introduced minimal spectral artifacts, preserving spectral integrity.

    Conclusions:

    • Grazing incidence optics are effective for enhancing X-ray flux in electron beam microanalysis.
    • The GIO is particularly beneficial for detecting low-energy X-ray signals.
    • The GIO offers a viable method to improve sensitivity in energy-dispersive X-ray spectroscopy with minimal drawbacks.