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Updated: Jul 26, 2026

Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
Application of X-ray Optics to Energy-Dispersive Spectroscopy
1Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI 53562
Abstract:
: X-ray optics have been used in X-ray analytical instruments for several years. Applications of X-ray optics have been reported in X-ray diffraction, X-ray fluorescence, and wavelength dispersive spectroscopy. X-ray optics have been used to increase the X-ray flux incident on the sample or to direct and focus emitted X-rays from a sample. We report here the use of a grazing incidence optic (GIO) as a flux-enhancing collimator for use with an energy-dispersive (ED) detector used to perform electron beam microanalysis. We found that the GIO in combination with an ED spectrometer (EDS) provides substantial intensity gain for X-ray lines with energy below 1 keV. The GIO is also found to provide a modest focus effect, and introduces minimal spectral artifacts.
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