How to optimize the design of a quantitative HREM experiment so as to attain the highest precision
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Den Dekker AJ1, Sijbers, Van Dyck D
1University of Antwerp, Department of Physics, Groenenborgerlaan 171, B-2020 Antwerp, Belgium.
Abstract:
Using parameter estimation theory, an expression is derived for the maximum precision with which the position of a single atom can be estimated from high resolution transmission electron microscopy images. This expression, being a complicated function of the object as well as of the microscope parameters and the electron dose, can be used to optimize the design of an HREM experiment so as to attain the highest precision.
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