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Related Experiment Videos

Plasma Cleaning and Its Applications for Electron Microscopy.

Isabell1, Fischione, O'Keefe

  • 1Fischione Research, 9003 Corporate Circle, Export, PA 15632

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|May 29, 1999
PubMed
Summary

High-frequency, low-energy reactive gas plasma effectively removes hydrocarbon contamination from electron microscopy specimens and components. Plasma cleaning ensures specimens remain free from carbonaceous contamination for extended examination periods.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Microscopy Techniques

Background:

  • Hydrocarbon contamination is a persistent issue in electron microscopy, affecting specimen integrity and analysis.
  • Existing cleaning methods may be insufficient or damaging to delicate samples.

Purpose of the Study:

  • To investigate the efficacy of reactive gas plasma cleaning for removing hydrocarbon contamination.
  • To assess the impact of plasma cleaning on specimen integrity and recontamination rates.
  • To evaluate the applicability of plasma cleaning for various electron microscopy components.

Main Methods:

  • Application of high-frequency, low-energy reactive gas plasma.
  • Analysis using transmission electron microscopy (TEM) and scanning electron microscopy (SEM).

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  • Evaluation of contamination removal and recontamination over time.

    • Main Results:

    • Complete elimination of carbonaceous contamination from TEM and SEM specimens.
    • Removal of existing carbon debris from prior microanalysis with extended cleaning.
    • Specimens remained free from recontamination for several hours post-cleaning.
    • Successful plasma cleaning of electron microscopy accessories like aperture strips and Wehnelts.

    Conclusions:

    • Reactive gas plasma is a highly effective method for hydrocarbon contamination removal in electron microscopy.
    • Plasma cleaning significantly enhances specimen quality and analytical reliability.
    • The technique is versatile, applicable to both specimens and essential microscopy components.