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High resolution electron backscatter diffraction with a field emission gun scanning electron microscope
1Manchester Materials Science Centre, Grosvenor Street, Manchester M1 7HS, U.K. john.humphreys@umist.ac.uk
Journal of Microscopy
|August 12, 1999
Abstract:
A scanning electron microscope with a thermal field emission gun (FEGSEM) is found to offer significant improvements in electron backscatter diffraction performance over a conventional W-filament scanning microscope. The spatial resolution is improved by a factor of approximately 3 in the FEGSEM and is optimized at probe currents of 50-300 nA and at 10-15 keV. The angular accuracy is optimized at probe currents above approximately 150 nA and at 30 keV.