Self-Assembled Monolayer and Multilayer of Trichlorogermane Hexyl Propylate and Formation of GeO(2)/SiO(2) Interface

Monolayer and multilayer films of trichlorogermane hexyl propylate (Ge6) were formed by the self-assembly method on hydroxylated silicon substrates. The results showed that this kind of trichlorogermane had virtually the same self-assembly behavior as trichlorosilanes. Ellipsometry proved that the self-assembled monolayers and multilayers (SAMs) of Ge6 exhibited a tilted orientation to the substrate surface. The multilayer film of Ge6 on silicon substrate was obtained by reducing the monolayer SAMs to alcohol hydroxylated surface with LiAlH(4) and repeating the self-assembly process. The self-assembled multilayer film was calcined in air at 500 degrees C to form a thin layer of GeO(2) on SiO(2)/Si substrate surface. The XPS measurement detected the formation of GeO(2) layer. Copyright 1999 Academic Press.