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Updated: Oct 19, 2026

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
Published on: December 21, 2015
[Dust as a factor in crystalline silicon production]
Abstract:
Up-to-date crystalline silicon production is characterized by such leading occupational hazards as higher level of dust with complicated chemical composition, aerosols that vary with technology and derive from disintegration of silica, crystalline silicon or condensation of silica. Experiments comparing prevalence of diseases caused by silica and crystalline silicon dusts in acute and chronic intratracheal administration and inhalation identified crystalline silicon as moderately fibrogenic and specified its MAC at 4 mg/m3 in the air of workplace.
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