Microfabrication of a combined AFM-SNOM sensor

Area of Science:

• Nanoscience and Nanotechnology
• Optical Physics
• Materials Science

Background:

• Atomic Force Microscopy (AFM) is a powerful tool for nanoscale imaging.
• Optical near-field microscopy offers high spatial resolution but can be challenging to integrate with mechanical scanning.
• Existing techniques often require separate measurements or complex setups.

Purpose of the Study:

• To fabricate a novel scanning probe sensor combining AFM with optical near-field detection.
• To integrate a photosensitive pn-junction and an aperture into an AFM tip.
• To enable simultaneous acquisition of force and optical near-field data.

Main Methods:

• Fabrication of a micro-machined Si cantilever with an integrated tip.
• Integration of a photosensitive pn-junction within the AFM tip.
• Application of an Aluminum (Al) coating with a 50-70 nm aperture at the tip apex.
• Characterization of the fabricated tip and demonstration of simultaneous force and photon imaging.

Main Results:

• Successful fabrication of a scanning probe sensor with integrated optical detection capabilities.
• Demonstration of spatially limited optical near-field interaction via the tip aperture.
• Presentation of initial results showing simultaneous recording of force and photon images from a sample.

Conclusions:

• The developed sensor effectively combines AFM and optical near-field probing.
• The integrated design allows for simultaneous data acquisition, enhancing nanoscale characterization.
• This technology opens new avenues for high-resolution imaging and analysis in various scientific fields.