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Related Experiment Videos

Characterization of High Resolution Resists and Metal Shims by Scanning Probe Microscopy.

Sexton1, Marnock

  • 1CSIRO Manufacturing Science and Technology, Private Bag 33, Clayton South MDC, Victoria 3169, Australia

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|April 1, 2000
PubMed
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Scanning probe microscopy (SPM) enables precise analysis of micro-patterns for technologies like CD manufacturing. This method allows for defect detection and process correction in lithography, improving product quality.

Area of Science:

  • Surface analysis
  • Nanotechnology
  • Materials science

Background:

  • Micro-pattern reproduction is crucial for technologies like CD manufacturing, hologram embossing, and security printing.
  • These patterns, with sub-micron to micron periodicity and depths up to 0.5 µm, require precise metrology for quality control.

Purpose of the Study:

  • To demonstrate the utility of scanning probe microscopy (SPM) for analyzing micro-patterns in lithographic production.
  • To evaluate the use of SPM for inspecting master resist plates and metal shims.
  • To showcase SPM's role in a feedback loop for optimizing lithographic processes.

Main Methods:

  • Utilizing a resonant low-contact force SPM with etched silicon cantilevers for non-damaging surface scanning.
  • Analyzing electron-beam lithography plates with 0.5 µm resist thickness using a Digital Instruments 3100 microscope.

Related Experiment Videos

  • Examining nickel replicas (father and mother shims) produced by electroforming from master plates.

    • Main Results:

    • SPM allows for accurate measurement of depths and lateral dimensions of micro-patterns.
    • Defects in metal shims can be identified before mass production of embossed foils.
    • SPM measurements of resist development profiles enable corrections to lithography exposures and development times.

    Conclusions:

    • SPM is a valuable tool for routine analysis and quality control in micro-pattern fabrication.
    • The feedback process using SPM measurements can significantly improve lithographic production accuracy.
    • SPM facilitates defect detection and process optimization in high-precision manufacturing.