Monolithic microfabricated valves and pumps by multilayer soft lithography

M A Unger1, H P Chou, T Thorsen

  • 1Department of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA.

Science (New York, N.Y.)
|February 7, 2001
PubMed
Summary

Multilayer soft lithography enables fabrication of complex microfluidic devices from elastomers. This technique significantly reduces device size and retains the benefits of traditional soft lithography.

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