A cylindrical micro-ultrasonic motor (stator transducer size: 1.4 mm in diameter and 5.0 mm long)

Ultrasonic motors are suitable for a micro-actuator because of a direct drive, no brake and their simple construction. In order to fabricate micro-ultrasonic motors, a piezoelectric thin film is essential. In this study, a hydrothermal method was adopted to deposit a PZT thin film. The dimensions of the stator transducer were: outer diameter, 1.4 mm; inner diameter, 1.2 mm; and length, 5.0 mm. The resonance frequency of the stator transducer was 227 kHz, and the vibration amplitude was 58 nmp-p at an input voltage of 4.0 Vp-p. The maximum revolution speed was 680 rpm, and the maximum starting torque was 0.67 microNm. The experimental conditions were 20 Vp-p and 5.3 mN pre-load. The motor property versus scale was investigated using an equivalent circuit. The calculated results indicated that the output torque of the 100 microns diameter motor was 27 nNm.