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Updated: Jul 20, 2026

Angle-resolved Photoemission Spectroscopy At Ultra-low Temperatures
Published on: October 9, 2012
Microcalorimeter energy-dispersive spectrometry using a low voltage scanning electron microscope
1National Institute of Standards and Technology (NIST), Boulder, CO 80303, USA NIST, Gaithersburg, MD 20899-8371, USA.
Abstract:
We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (&mgr;cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy &mgr;cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype &mgr;cal EDS has been used to solve problems in low-voltage microanalysis, including the analysis of tungsten silicide (WSi2), titanium nitride (TiN) and barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.
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