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A parallel miniature cylindrical ion trap array
Analytical Chemistry
|August 12, 2000
Summary
This study presents a novel mass spectrometer array using multiple cylindrical ion traps (CITs). This design enhances ion capacity while maintaining low power, proving effective for process gas monitoring.
Area of Science:
- Analytical Chemistry
- Instrument Development
- Physical Chemistry
Background:
- Miniature mass spectrometers offer portability and low power but often have limited ion capacity.
- Cylindrical ion traps (CITs) are suitable for miniaturization but face challenges in sensitivity and throughput.
- Scaling up ion trap arrays is a potential strategy to enhance performance.
Purpose of the Study:
- To develop and characterize a novel mass spectrometer array composed of multiple cylindrical ion traps (CITs).
- To evaluate the performance of a multi-CIT array in terms of ion capacity, resolution, and sensitivity.
- To demonstrate the applicability of the multi-CIT array for process gas monitoring.
Main Methods:
- Fabrication of a four-element array of CITs with an inner radius of 2.5 mm, operated in parallel.
- Comparison of signal intensity between two-element and four-element CIT arrays.
- Mass analysis of m-dichlorobenzene to determine resolution.
- Detection of trace krypton in argon for process gas monitoring.
- Preliminary testing of a ten-element CIT array with 1.5 mm inner radius.
Main Results:
- The four-element CIT array demonstrated increased ion capacity compared to smaller arrays.
- Resolution for m-dichlorobenzene was approximately 180 (FWHM) without significant loss due to array configuration.
- Successful detection of 5 x 10(-9) Torr partial pressure of krypton in argon with a signal-to-noise ratio of ~30.
- A preliminary spectrum from a 10-CIT array was acquired, indicating scalability.
Conclusions:
- The multi-CIT array design effectively increases ion capacity while retaining the benefits of miniature ion traps.
- The developed mass spectrometer array shows promise for sensitive and reliable process gas monitoring.
- Further development with larger arrays and smaller trap dimensions is feasible and warrants investigation.