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NonliNEAR vertical oscillations of a particle in a sheath of a rf discharge
A V Ivlev1, R Sütterlin, V Steinberg
1Max-Planck-Institut für Extraterrestrische Physik, D-85740 Garching, Germany. ivlev@mpe.mpg.de
Physical Review Letters
|November 1, 2000
Abstract:
A new simple method to measure the spatial distribution of the electric field in the plasma sheath is proposed. The method is based on the experimental investigation of vertical oscillations of a single particle in the sheath of a low-pressure radio-frequency discharge. It is shown that the oscillations become strongly nonlinear as the amplitude increases. The theory of anharmonic oscillations provides a good quantitative description of the data and gives estimates for the first two anharmonic terms in an expansion of the sheath potential around the particle equilibrium.