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Updated: Jul 20, 2026

Quantification of Hydrogen Concentrations in Surface and Interface Layers and Bulk Materials through Depth Profiling with Nuclear Reaction Analysis
Published on: March 29, 2016
Nondestructive Angle-resolved X-ray Depth Profiling: Interpretation of Angle-resolved Profiles Using a Monte Carlo
1Department of Physics, The University of York, Heslington, York, YO10 5DD, UK
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A technique has been developed for the interpretation of composition-depth profiles from angle-resolved X-ray data using a Monte Carlo electron scattering simulation. This is a nondestructive depth profiling procedure. Software has been developed that uses a Monte Carlo scattering simulation to generate the signal intensity from a multilayer sample for any combination of primary beam angle of incidence and take-off angle to the X-ray detector. An interactive C++ application uses this simulation to interpret measured angle-resolved depth profiles. The method has been tested using a custom-made Ag/Al "staircase" sample containing two layers each of Ag and Al. Using the technique, it is possible to quantify the composition-depth profile for the two- and three-layer "steps" of the sample. Qualitative information may be gained about the four-layer area of the sample.
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