Study and fabrication of the PbTiO3 thin film acoustic sensors

In this study, thin film acoustic sensors were fabricated utilizing the r.f. planar magnetron sputtering method and micromachining techniques. Underwater testing results indicated that the maximum receiving sensitivity of -117.8 dBV microbar(-1) occurred at 5.5 MHz. For the acoustic sensors tested, the highest transmitting intensities were 26.5 dBV/microbar at a fundamental resonant frequency of 7 MHz, 40.4 dBV microbar(-1) at the third harmonic of 21 MHz, and 37.1 dBV microbar(-1) at half the fundamental frequency or 3.5 MHz. Underwater measurements also indicated that the larger the sample area, the higher the transmitting intensity and receiving sensitivity.