Structural transformation in the formation of H-induced (111) platelets in Si

On the basis of first-principles calculations, we present a structural model for the formation of H-induced (111) platelets in Si, which involves a structural transformation from a double-layer-H2(*) configuration of H2(*) aggregates into an H-saturated internal (111) surface structure. This reaction process preferably occurs at high H plasma treatment temperatures and subsequently generates H2 molecules in the platelet voids, consistent with experiments. Our model also reveals the important features observed in (111) platelets, such as high-resolution transmission electron microscopy images, step structures, lattice dilation lengths, and H vibrational frequencies.