Near-field optical microscopy based on microfabricated probes
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Updated: Oct 8, 2026

The Microfluidic Probe: Operation and Use for Localized Surface Processing
Published on: June 4, 2009
R Eckert1, J M Freyland, H Gersen
1Centre Suisse d'Electronique et de Microtechnique CSEM S.A., Rue Jaquet-Droz 1, 2007 Neuchâtel, Switzerland. rolf.eckert@csem.ch
Abstract:
We demonstrate high resolution imaging with microfabricated, cantilevered probes, consisting of solid quartz tips on silicon levers. The tips are covered by a 60-nm thick layer of aluminium, which appears to be closed at the apex when investigated by transmission electron microscopy. An instrument specifically built for cantilever probes was used to record images of latex bead projection patterns in transmission as well as single molecule fluorescence. All images were recorded in constant height mode and show optical resolutions down to 32 nm.
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