C Quintana1, J P Lechaire, N Bonnet
1Instituto de Microelectrónica de Madrid, CNM, CSIC, PTM, Tres Cantos, Madrid, Spain. carmen@imm.cnm.csic.es
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This study compares background fitting models for elemental mapping in Transmission Electron Microscopy. The log-polynomial model offers better accuracy than the power law, especially in low-energy regions, improving elemental map generation.
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