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Effect of an internal rotating current on low-frequency inductively coupled plasmas

E L Tsakadze1, K N Ostrikov, S Xu

  • 1Plasma Processing Laboratory, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616 Singapore, Republic of Singapore.

Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics
|April 20, 2001
PubMed

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