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Related Experiment Videos

An atmospheric-pressure plasma process for C2F6 removal.

M B Chang1, S J Yu

  • 1Graduate Institute of Environmental Engineering, National Central University, Chungli 320, Taiwan, R.O.C. mbchang@ncuen.ncu.edu.tw

Environmental Science & Technology
|May 2, 2001
PubMed
Summary

This study shows combined plasma catalysis effectively removes perfluorocompounds (PFCs), a potent greenhouse gas, from industrial processes. Atmospheric-pressure plasma processing achieved high removal efficiencies for C2F6.

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Area of Science:

  • Environmental Science
  • Chemical Engineering
  • Plasma Physics

Background:

  • Perfluorocompounds (PFCs) are persistent greenhouse gases utilized in semiconductor manufacturing (e.g., plasma etching, CVD).
  • Their high infrared absorption intensifies the greenhouse effect, necessitating efficient abatement strategies.
  • Current abatement methods require optimization for environmental and industrial sustainability.

Purpose of the Study:

  • To evaluate the efficacy of dielectric barrier discharges (DBD) for converting C2F6, a common PFC.
  • To investigate the enhancement of PFC removal efficiency through combined plasma catalysis (CPC).
  • To determine optimal operating parameters for atmospheric-pressure plasma processing of PFCs.

Main Methods:

  • A bench-scale experimental system utilizing dielectric barrier discharges (DBD) at atmospheric pressure was designed.

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  • The system processed C2F6 in various gas mixtures, including nitrogen, argon, and oxygen.
  • Combined plasma catalysis (CPC) was explored by integrating catalysts with the DBD process.

    • Main Results:

    • C2F6 removal efficiency increased with higher applied voltage and frequency in DBD.
    • CPC significantly enhanced C2F6 removal efficiency compared to DBD alone.
    • Up to 94.5% C2F6 removal was achieved using CPC under specific conditions (15 kV, 240 Hz, N2:Ar:O2:C2F6 = 50:40:10:0.03).

    Conclusions:

    • Atmospheric-pressure DBD processing is a viable method for PFC abatement.
    • Combined plasma catalysis offers a synergistic approach to improve PFC conversion efficiency.
    • This research provides a pathway for developing more effective industrial PFC abatement technologies.