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Analysis of SAW propagation in gratings on ZnO/diamond substrates
1Department of Electrical and Computer Engineering, McMaster University, Hamilton, Ontario, Canada L8S 4K1.
Abstract:
The space harmonic method is used to analyze surface acoustic wave (SAW) propagation under an infinite periodic metal grating on ZnO/diamond composite layered substrates. Dispersion properties for shorted and open gratings are derived as a function of the thickness of the grating electrodes. From these dispersion relations, the coupling of modes (COM) parameters are derived. Energy profiles inside ZnO/diamond show that the energies contained in each of the ZnO and diamond layers are of the same order when the thickness of the ZnO layer is P/pi (P = grating period) and that the energy is contained within two wavelengths below the ZnO/diamond interface.
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