Travelling wave ultrasonic motor using the B08 flexural mode of a circular membrane

This paper describes the design, construction, and performance of a piezoelectric motor that uses the travelling B08 mode of an 80-mm diameter circular membrane to drive a rotor by frictional contact. The motor is of a thin planar design, giving high torque of up to 0.33 Nm at low speed and has been developed as a design that can be made with lithographic techniques for miniaturization. Investigations of the free stator with a vibration pattern imager and impedance analyzer gave the resonance frequency, mode, and electromechanical coupling of the stator. Motor speed as a function of frequency for a constant voltage and performance charts of speed, output power, and efficiency against torque are presented for a particular input voltage and rotor pre-load. The effects of two different lead zirconate titanate (PZT) ring dimensions have been investigated. Excitation of the B09 mode has been observed, incommensurate with the piezoelectric excitation of the stator. This is discussed with relation to edge-clamping of the stator. Single standing wave motoring was observed, believed to arise from asymmetry of the stator and its perturbation of the B08 resonance mode. Sources of power loss, including frame vibration and friction interface slip, are considered and discussed.