High-speed scanning by dual feedback control in SNOM/AFM

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Updated: Oct 7, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
05:04

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

Published on: June 13, 2023

A Egawa1, N Chiba, K Homma

  • 1Corporate R & D, Seiko Instruments Inc., Chiba, Japan. egawa@tk.sii.co.jp

Journal of Microscopy
|June 5, 2001
PubMed

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