A high-resolution add-on in-lens attachment for scanning electron microscopes

Area of Science:

• Materials Science
• Physics
• Instrumentation

Background:

• Scanning Electron Microscopes (SEMs) are crucial for high-resolution imaging.
• Existing SEMs may lack the capability for advanced high-resolution or spectroscopic analysis.
• Objective lens design significantly impacts SEM performance and resolution.

Purpose of the Study:

• To design and test a compact add-on objective lens for SEMs.
• To improve the spatial resolution of existing SEM instruments.
• To enable quantitative voltage contrast spectroscopy in SEMs.

Main Methods:

• Development of a compact (<35 mm high) permanent magnet immersion lens.
• Integration of the lens as an attachment to the SEM specimen stage.
• Utilizing a deflector for multichannel voltage contrast spectrometry.

Main Results:

• The add-on lens typically improves SEM spatial resolution by a factor of three.
• The unit accommodates specimen heights up to 10 mm.
• Initial experiments demonstrate significant voltage contrast acquisition.

Conclusions:

• The compact add-on lens effectively enhances SEM spatial resolution.
• This attachment allows existing SEMs to operate in a high-resolution in-lens mode.
• The lens serves as a versatile tool for both imaging and voltage contrast spectroscopy.