M Koguchi1, H Kakibayashi, R Tsuneta
1Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo, Japan. Masanari-crl.Koguchi@c-net3.crl.hitachi.co.jp
A novel scanning transmission electron microscope enables 3D nanostructure imaging. This new 3D-STEM technology uses precise rotation and focused ion beam preparation for detailed topographical reconstruction of nanoparticles and semiconductor devices.
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