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Related Experiment Videos

Longitudinal-bending mode micromotor using multilayer piezoelectric actuator.

K Yao1, B Koc, K Uchino

  • 1International Center for Actuators and Transducers (ICAT), Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802, USA. k-yao@imre.org.sg

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|August 2, 2001
PubMed
Summary

This study presents novel 3 mm ultrasonic motors utilizing lead zirconate titanate (PZT) piezoelectric actuators. These motors achieve bidirectional operation and demonstrate significant starting and braking torque, crucial for micro-device applications.

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Robotics

Background:

  • Miniaturization of actuators is critical for micro-robotics and precision engineering.
  • Piezoelectric materials offer high energy density and precise control for micro-actuation.

Purpose of the Study:

  • To develop and characterize novel longitudinal-bending mode ultrasonic motors with a 3 mm diameter.
  • To investigate the bidirectional operational capabilities and torque performance of these micromotors.

Main Methods:

  • Fabrication of stacked multilayer piezoelectric actuators using self-developed hard lead zirconate titanate (PZT) ceramic.
  • Conversion of longitudinal vibration to bending vibration using a longitudinal-bending coupler.
  • Analysis of transient velocity response to determine starting and braking torque.

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Main Results:

  • Successfully fabricated 3 mm diameter ultrasonic motors capable of bidirectional operation by adjusting driving frequency.
  • Achieved a maximum starting torque of 127.5 microNm under a load of moment of inertia 2.5 x 10(-7) kgm2.
  • Determined braking torque to be constant and approximately equivalent to the maximum starting torque, independent of driving conditions.

Conclusions:

  • The developed PZT-based ultrasonic motors exhibit promising performance for micro-scale applications requiring precise motion and significant torque.
  • The bidirectional control and consistent braking torque highlight the potential of these micromotors in advanced micro-systems.