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Updated: Sep 1, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Generation of an X-ray microbeam for spectromicroscopy at SPring-8 BL39XU
S Hayakawa1, N Ikuta, M Suzuki
1Applied Physics and Chemistry, Hiroshima University, Higashi-Hiroshima, Japan. hayakawa@hiroshima-u.ac.jp
Abstract:
A pair of elliptical mirrors (KB mirror) was designed and fabricated to realize an energy tunable x-ray microbeam for spectromicroscopy at SPring-8 BL39XU. As is commonly recognized, the obtainable beam size with the aspherical total reflection mirrors is strongly affected with the slope error of the mirror. Considering that the extremely high brilliance of the undulator radiation from the SPring-8, the small mirror size and the small mirror-to-focus distance were employed to minimize effects of the slope error. Preliminary evaluation of the KB mirror was carried out using 10 keV monochromatized undulator radiation. Alignment of the mirror was assisted by the beam monitor system composed of a scintillator and a CCD, and the beam size less than 5 microm can be easily achieved even when the source was fully used. The beam size obtained with this experiment was 2 x 4 microm2 with the photon flux of 1 x 10(10) photons/s. Smaller beam size may be expected with the use of intermediate slits. Characterization of trace elements with the spatial resolution will be carried out by using x-ray fluorescence (XRF) analysis and x-ray absorption fine structure (XAFS) measurements with XRF yield method.
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