Related Experiment Videos
Small blaze angle gratings with various surface treatments for use in the extreme ultraviolet
A Miller1, P Jelinsky, S Bowyer
1University of California, Space Sciences Laboratory, Berkeley 94720, USA.
Applied Optics
|December 1, 1989
Abstract:
Three replica gratings were made from a single master; two were epoxy overcoated with different thicknesses of gold, and one was replicated directly in gold. Their performance in EUV light at grazing incidence angles was measured and compared.