J D Meindl1, Q Chen, J A Davis
1School of Electrical and Computer Engineering, Microelectronics Research Center, Georgia Institute of Technology, Atlanta, GA 30332-0269, USA. james.meindl@mirc.gatech.edu
Silicon semiconductor technology offers vast potential for terascale integration (TSI), enabling over a trillion transistors per chip. Achieving this requires advanced double-gate transistors and overcoming interconnect challenges for future nanoelectronics.
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