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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
07:37

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

Published on: December 21, 2015

Analysis of 3-D vibrations of rectangular AT-cut quartz plates with a bi-mesa structure

H Sekimoto1, S Goka, Y Watanabe

  • 1Department of Electrical Engineering, Graduate School of Tokyo Metropolitan University, Japan. sekimoto@sknext.eei.metro-u.ac.jp

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|September 26, 2001
PubMed

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