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Updated: Oct 3, 2026

Obtaining 3D Chemical Maps by Energy Filtered Transmission Electron Microscopy Tomography
Published on: June 9, 2018
Mapping the chemistry in nanostructured materials by energy-filtering transmission electron microscopy (EFTEM)
F Hofer1, P Warbichler, H Kronberger
1Forschungsinstitut für Elektronenmikroskopie, Technische Universität Graz und Zentrum für Elektronenmikroskopie Graz, Austria. ferdinand.hofer@felmi-zfe.at
Abstract:
Energy-filtered transmission electron microscopy (EFTEM) can be used to acquire elemental distribution maps at high lateral resolution within short acquisition times, which makes it quite efficient for a detailed characterization of nanostructures, as illustrated with examples concerning a nanostructured substituted La-based cermet compound and a nanoscale multilayer. In the first example, we show how phases in a rapidly cooled substituted LaNi5 can be visualized by recording jump ratio images. Secondly, EFTEM was capable of imaging individual nanoscale layers in a magnetic multilayer consisting of 2 nm terbium and 3 nm iron.
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