Development of ISFET array-based microsystems for bioelectrochemical measurements of cell populations

Monitoring the bioelectrochemical activity of living cells with sensor array-based microsystems represents an emerging technique in a large area of biomedical applications, ranging from basic research to various fields of pharmacological analyses. The main appeal is the ability of these miniaturised microsystems to perform, in real time, non-invasive in-vitro investigations of the physiological state of a cell population. In this paper, we present two different microsystems designed for multisite monitoring of the physiological state of a cell population. The first microsystem, intended for cellular metabolism monitoring, consists of an array of 12 spatially distributed ISFETs to detect small pH variations induced by the cell population. The second microsystem consists of an array of 40 ISFETs and 20 gold microelectrodes and it has been designed to monitor the electrical activity of neurons. This is achieved by direct coupling of the neuronal culture with the ISFET sensitive layer and by utilising gold microelectrodes for neuronal electrical stimulation.