D Blavette1, F Vurpillot, P Pareige
1Group of Material Physics, UMR CNRS 6634-UFR Sciences, Universite de Rouen, Mont-Saint-Aignan, France. didier.blavette@univ-rouen.fr
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This study presents a new analytical model to correct spatial resolution errors in three-dimensional atom probe analysis, improving the accuracy of composition determination for small precipitates. The model accurately predicts ion trajectory overlaps, crucial for materials science research.
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