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Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

Doubly rotated quartz resonators with a low amplitude-frequency effect: the LD-cut

N Gufflet1, F Sthal, J J Boy

  • 1Laboratoire de Chronométrie, Electronique et Piézoélectricité, Ecole Nationale Supérieure de Mécanique et des Microtechniques, Besançon, France.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 22, 2002
PubMed

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