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Normalized fifth-order spherical aberration coefficients derived from a Gaussian trajectory on rotationally
1Key Laboratory of Optoelectronics Information Science & Technology, EMC, Institute of Optoelectronics & Precision Instrument, Tianjin University, China.
Micron (Oxford, England : 1993)
|January 30, 2002
Abstract:
This paper reports normalized fifth-order spherical aberration coefficients C(5s)/R derived from Gaussian trajectory for rotationally symmetrical magnetic lenses, where S/D (the polepiece gap-width/bore-diameter ratio) is in the range 0.20-2.00, and k(2) (the lens-intensity parameter) is 0.10-100. It is noted that the normalized fifth-order spherical-aberration coefficient C(5s)/R changes its sign within the given parameter ranges.