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Design optimization of beam-like ferroelectrics-silicon microphone and microspeaker
Ren Tian-Ling1, Zhang Lin-Tao, Liu Li-Tian
1Institute of Microelectronics, Tsinghua University, Beijing, PR China. RenTL@mail.tsinghua.edu.cn
Abstract:
Design optimization of beam-like ferroelectrics-silicon integrated microphone and microspeaker is studied. The Pt/Pb(Zr,Ti)O3/Pt/SiO2/Si3N4 cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are very high. This integrated microphone and microspeaker will be valuable for high quality micro-acoustic devices.