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Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer.

Takamasa Suzuki1, Toshiyuki Maki, Xuefeng Zhao

  • 1Faculty of Engineering, Niigata University, Japan. takamasa@eng.niigata-u.ac.jp

Applied Optics
|April 9, 2002
PubMed
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This study introduces a surface profiler with a feedback controller to minimize disturbances. An electronic shutter allows high-speed modulation, improving performance over traditional low-frequency methods.

Area of Science:

  • Optical Engineering
  • Metrology
  • Instrumentation

Background:

  • Surface profilers are crucial for precise measurements.
  • External disturbances can significantly impact measurement accuracy.
  • Traditional integrating-bucket methods often require low-frequency operation.

Purpose of the Study:

  • To propose and demonstrate a surface profiler with an integrated feedback controller.
  • To enhance the performance of surface profiling by mitigating external disturbances.
  • To enable high-speed phase modulation within the integrating-bucket method.

Main Methods:

  • Incorporation of a feedback controller to counteract external disturbances.
  • Utilizing a CCD camera with an electronic shutter.

Related Experiment Videos

  • Application of high-speed sinusoidal phase modulation.
  • Adaptation of the integrating-bucket method for standard video rates.
  • Main Results:

    • The developed surface profiler effectively eliminates external disturbances.
    • The feedback loop's frequency response is critical for overall performance.
    • High-speed sinusoidal phase modulation was successfully implemented.
    • The technique operates under standard video rates, overcoming previous limitations.

    Conclusions:

    • The proposed surface profiler with a feedback controller offers improved accuracy and performance.
    • The electronic shutter enables high-speed modulation, enhancing the integrating-bucket method.
    • This advancement allows for more efficient and precise surface metrology.