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Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation.

Takamasa Suzuki1, Takayuki Yazawa, Osami Sasaki

  • 1Faculty of Engineering, Niigata University, Japan. takamasa@eng.niigata-u.ac.jp

Applied Optics
|April 9, 2002
PubMed
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This study introduces a novel interferometer system using two wavelengths for precise step height measurement. The system accurately detected a 1-microm step height, demonstrating its effectiveness.

Area of Science:

  • Optical metrology
  • Interferometry
  • Surface characterization

Background:

  • Accurate measurement of microscale structures is crucial in various scientific and industrial fields.
  • Traditional interferometry methods can face challenges with complex surfaces or overlapping interference patterns.

Purpose of the Study:

  • To develop and demonstrate a novel interferometer system capable of measuring step height using dual wavelengths.
  • To overcome limitations of single-wavelength systems in separating overlapping interference images.

Main Methods:

  • Utilized a dual-wavelength interferometer system with two laser diodes.
  • Employed time-sharing sinusoidal phase modulation for signal separation.
  • Applied an integrating-bucket method for detecting overlapping interference images with a CCD camera.

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Main Results:

  • Successfully separated overlapping interference images from two separate wavelengths.
  • Generated a phase map exclusively for the modulated laser diode.
  • Accurately detected a 1-microm step height.

Conclusions:

  • The developed dual-wavelength interferometer system offers a robust method for precise step height measurement.
  • The combination of time-sharing modulation and integrating-bucket detection effectively resolves overlapping interference patterns.