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Phase-shifting interferometry immune to vibration.

B K Ngoi1, K Venkatakrishnan, N R Sivakumar

  • 1PEN Centre, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore. mbngoi@ntu.edu.sg

Applied Optics
|April 18, 2002
PubMed
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This study introduces a modified phase-shifting interferometry technique for precise microsurface profiling of vibrating flat surfaces. The novel method ensures accurate measurements by eliminating motion-related errors and demonstrating immunity to vibrations.

Area of Science:

  • Optics and Photonics
  • Metrology
  • Surface Science

Background:

  • Microsurface profiling is crucial for optical component quality control.
  • Vibrating environments pose significant challenges to traditional interferometric measurements.
  • Existing phase-shifting interferometry methods are susceptible to motion-induced errors.

Purpose of the Study:

  • To develop a robust phase-shifting interferometry technique for microsurface profiling of flat surfaces under vibration.
  • To mitigate errors caused by environmental factors and object motion.
  • To enable instantaneous phase measurement for dynamic profiling.

Main Methods:

  • A modified phase-shifting interferometry approach utilizing quarter-wave plates and polarizers for precise phase control.

Related Experiment Videos

  • Implementation of a nearly common optical-path configuration to minimize environmental disturbances.
  • Development of an instantaneous phase measurement capability.

    • Main Results:

    • The modified technique effectively eliminates phase errors associated with motion.
    • Experimental validation on a mirror surface demonstrated immunity to both high and low-frequency vibrations.
    • The system showed reduced sensitivity to environmental influences.

    Conclusions:

    • The proposed phase-shifting interferometry modification offers a vibration-immune solution for microsurface profiling.
    • This technique enhances the versatility and accuracy of metrology for dynamic or vibrating objects.
    • The method provides a reliable tool for precise surface characterization in challenging conditions.