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Tilt-compensating algorithm for phase-shift interferometry.

Adrian Dobroiu1, Dan Apostol, Victor Nascov

  • 1National Institute for Laser, Plasma and Radiation Physics, Bucharest, Romania. dobad@ifin.nipne.ro

Applied Optics
|May 15, 2002
PubMed
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This study introduces a self-calibrating algorithm for phase-shift interferometry. The novel method accurately retrieves phase steps and tilts using only three interferograms, eliminating the need for prior tilt or phase shift information.

Area of Science:

  • Optical Metrology
  • Interferometry
  • Image Processing

Background:

  • Phase-shift interferometry (PSI) is sensitive to environmental disturbances.
  • Accidental relative tilts during phase stepping can introduce significant errors.
  • Existing PSI methods often require precise control or prior knowledge of system parameters.

Purpose of the Study:

  • To develop a self-calibrating algorithm for PSI.
  • To cancel the effects of accidental relative tilts during phase stepping.
  • To retrieve both phase steps and accompanying tilts without prior information.

Main Methods:

  • Division of interferogram space into blocks.
  • Application of a previously reported self-calibrating algorithm to local blocks.

Related Experiment Videos

  • Calculation of local phase shifts and extraction of global shift and tilt values.
  • Utilizing a fitting routine for result refinement.

    • Main Results:

    • Successful cancellation of accidental relative tilts.
    • Accurate retrieval of phase steps and accompanying tilts.
    • Requirement of only three phase-shifted interferograms.
    • No need for prior information on intentional phase shifts or tilts.

    Conclusions:

    • The proposed algorithm offers robust phase retrieval in the presence of tilts.
    • It simplifies PSI procedures by removing the need for precise alignment.
    • This method enhances the reliability and accuracy of optical metrology measurements.