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Black layer coatings for the photolithographic manufacture of diffraction gratings
Daniel Poitras1, J A Dobrowolski, Tom Cassidy
1Institute for Microstructural Sciences, National Research Council of Canada, Ottawa, Ontario. daniel.poitras@nrc.ca
Applied Optics
|June 18, 2002
Abstract:
A black layer coating for an aluminum-photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25 degrees is described. It is made of space-compatible materials, and its rms roughness is less than 15 A.