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High-accuracy standard specimens for the line-focus-beam ultrasonic material characterization system
Jun-ichi Kushibiki1, Mototaka Arakawa, Ryoichi Okabe
1Department of Electrical Engineering, Tohoku University, Sendai, Japan. kushi@ecei.tohoku.ac.jp
Summary
Standard specimens of nonpiezoelectric single crystals and synthetic silica glass were developed for ultrasonic material characterization. This enables accurate determination of leaky surface acoustic wave properties for precise surface analysis.
Area of Science:
- Materials Science
- Acoustics
- Solid State Physics
Background:
- Accurate material characterization relies on precise acoustic parameter determination.
- Standard specimens are crucial for calibrating ultrasonic systems and ensuring data reliability.
- Existing standard specimens may not cover the required phase velocity range for leaky surface acoustic waves (LSAWs).
Purpose of the Study:
- To develop and validate standard specimens for line-focus-beam ultrasonic material characterization.
- To enable accurate measurement of phase velocity and attenuation of Rayleigh-type LSAWs.
- To establish reliable acoustical physical constants for standard materials.
Main Methods:
- Preparation of standard specimens using nonpiezoelectric single crystals (GGG, Si, Ge) and synthetic silica glass.
- Utilized a line-focus-beam ultrasonic material characterization system.
- Employed the complex-mode measurement method with diffraction effect correction to determine elastic constants.
- Measured bulk acoustic properties (velocity, density) with high accuracy (+/-0.004% for bulk wave velocity).
Main Results:
- Developed standard specimens covering a phase velocity range of 2600 to 5100 m/s for LSAWs.
- Accurately determined elastic constants and other acoustical physical constants for the developed specimens.
- Observed discrepancies with previously published values, attributed to specimen variations.
- Identified variations in acoustic properties among different manufacturers' SiO2 substrates.
Conclusions:
- The developed standard specimens are effective for accurate ultrasonic material characterization.
- The study highlights the importance of specimen consistency and accuracy in acoustic measurements.
- This work provides a foundation for more reliable surface analysis using LSAW techniques.