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Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral

Dalip Singh Mehta1, Masaya Sugai, Hideki Hinosugi

  • 1University of Electro-Communications, Chofu, Tokyo, Japan.

Applied Optics
|July 9, 2002
PubMed
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A new spectral interference microscope measures 3D step-height and creates tomographic images of discontinuous objects without contact. This advanced optical imaging technique achieves submicrometer resolution for detailed surface analysis.

Area of Science:

  • Optical Microscopy
  • Metrology
  • Biomedical Imaging

Background:

  • Traditional microscopy often requires physical contact or mechanical scanning, limiting its application for delicate or discontinuous samples.
  • Accurate three-dimensional (3D) metrology and tomographic imaging are crucial for analyzing complex structures in various scientific fields.

Purpose of the Study:

  • To develop a noncontact, nonmechanical, wide-field spectral interference microscope for simultaneous 3D step-height measurement and tomographic imaging.
  • To achieve high-resolution imaging and metrology of discontinuous objects using advanced spectral interferometry.

Main Methods:

  • Utilized a superluminescent diode (SLD) as a broadband light source and a liquid-crystal Fabry-Perot interferometer (LC-FPI) for frequency scanning.
  • Employed Fourier-transform techniques to analyze spectral fringe signals, extracting both amplitude and phase information.

Related Experiment Videos

  • Controlled SLD injection current to equalize spectral profiles and ensure constant light input across the scan range.

    • Main Results:

    • Successfully measured 3D step-height distribution of discontinuous objects with submicrometer resolution using phase information.
    • Obtained optically sectioned images (tomographic imaging) from amplitude information or a combination of amplitude and phase.
    • Demonstrated the system's capability for simultaneous metrology and imaging in experimental results.

    Conclusions:

    • The developed spectral interference microscope offers a versatile, noncontact solution for high-resolution 3D metrology and tomographic imaging.
    • The technique effectively analyzes discontinuous objects, opening possibilities for advanced surface characterization and imaging applications.