Muller matrix measurements of small spherical particles deposited on a c-Si wafer

Müller matrix ellipsometry measurements are performed on accurately sized polystyrene latex and silicon oxide spherical particles deposited on a crystalline silicon surface. The mean particle diameter ranges from 0.2 to 1.5 microm. An argon laser beam (wavelength, 515 nm) impinges on the sample at a fixed near-grazing-incidence angle. The Müller matrix of the diffuse light scattered by the particles is measured in the plane of incidence as a function of the scattering angle. Results are presented and compared with Bobbert and Vlieger's theory. In particular the validity range of Videen's model is estimated.