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iTIRM as a tool for qualifying polishing processes.

Oliver W Fähnle1, Torsten Wons, Evelyn Koch

  • 1FISBA-Optik, Gallen, Switzerland. oliver.faehnle@fisba.ch

Applied Optics
|July 9, 2002
PubMed
Summary

A new classification method for polishing processes uses intensity-detecting total-internal-reflection microscopy (iTIRM). This method measures surface quality changes and polishing duration, unlike Preston

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Area of Science:

  • Materials Science
  • Surface Metrology
  • Manufacturing Engineering

Background:

  • Polishing processes are critical for achieving desired surface finishes in various manufacturing applications.
  • Existing methods like Preston's law primarily focus on material removal rates.
  • A need exists for methods that comprehensively assess surface quality changes during polishing.

Purpose of the Study:

  • To introduce a novel classification method for polishing processes.
  • To establish a new approach for evaluating polishing performance beyond simple removal rates.
  • To characterize polishing based on surface quality evolution and process duration.

Main Methods:

  • Utilized in situ intensity-detecting total-internal-reflection microscopy (iTIRM) for measurements.

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  • Developed a classification system based on two key parameters derived from iTIRM data.
  • Applied the method in a routine laboratory setting for polishing process analysis.

    • Main Results:

    • Identified two novel parameters from iTIRM measurements for polishing process classification.
    • Demonstrated that these parameters quantify changes in surface quality (roughness, subsurface damage, scratch, and dig).
    • Showed that the parameters also indicate the duration of the polishing process.

    Conclusions:

    • The proposed iTIRM-based classification method offers a new perspective on polishing process evaluation.
    • This method provides a more comprehensive understanding of polishing outcomes compared to traditional removal rate models.
    • The technique is suitable for regular laboratory application in assessing and classifying polishing processes.