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Miniaturization of surface acoustic waves rotary motor
L P Cheng1, G M Zhang, S Y Zhang
1Lab of Modern Acoustics, Institute of Acoustics, Nanjing University, China. chenglp_nju@yahoo.com.cn
Ultrasonics
|July 12, 2002
Abstract:
This paper presents the experimental study of a miniaturized surface acoustic waves (SAWs) rotary motor and the theoretical calculation. After the first success in SAW rotary motor operating at 9.85 MHz, a smaller rotary motor is designed. With the operating frequency of 30 MHz and the driving voltage of 120 V(p-p), the motor can rotate at a speed of 270 rpm.
