Related Experiment Video
Updated: Jul 29, 2026

Measurement of Bioelectric Current with a Vibrating Probe
Published on: January 4, 2011
Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator
Takefumi Kanda1, Minoru K Kurosawa, Toshiro Higuchi
1The University of Tokyo, Graduate School of Engineering, Japan. kanda@intellect.pe.u-tokyo.ac.jp
Abstract:
In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

