Atomic resolution three-dimensional electron diffraction microscopy
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Updated: Sep 29, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Jianwei Miao1, Tetsu Ohsuna, Osamu Terasaki
1Stanford Synchrotron Radiation Laboratory, Stanford Linear Accelerator Center, Stanford University, California 94309-0210, USA.
Abstract:
We report the development of a novel form of diffraction-based 3D microscopy to overcome resolution barriers inherent in high-resolution electron microscopy and tomography. By combining coherent electron diffraction with the oversampling phasing method, we show that the 3D structure of a nanocrystal can be determined ab initio at a resolution of 1 A from 29 simulated noisy diffraction patterns. This new form of microscopy can be used to image the 3D structures of nanocrystals and noncrystalline samples, with resolution limited only by the quality of sample diffraction.
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